For the first two pictures of the cicada hatch in my area, I used a Leica 90mm with a 25mm extension tube. For the third, I used a Canon FD 85mm short tele with a Vivitar 2x macro-focusing teleconverter. Extension tubes or the Vivitar macro-focus 2x are widely available for nearly every camera make.
If you like macro, you can save a lot by using only manual equipment. Autofocus is of little help with macro, and autofocus extension tubes cost as much as good manual focus macro lenses.
Copyright for these photos belongs solely to Doug Nelson. Images may not be copied, downloaded, or used in any way without the expressed, written permission of the photographer.